| 000 | 00358nam a2200121Ia 4500 | ||
|---|---|---|---|
| 005 | 20251007104243.0 | ||
| 008 | 251006s9999 xx 000 0 und d | ||
| 100 | _atopfer,morton l. | ||
| 245 | 0 | _a.thick-ffilm microelectronics;fabrication,design, and applications. topfer,morton l. | |
| 260 | _a1st.ed | .New York an Nostrand | ||
| 260 | _c1971 | ||
| 942 | _cBOK | ||
| 999 |
_c3371 _d3371 |
||